Monitoring resistor element and measuring method of relative preciseness of resistor elements
A monitoring resistor element includes a plurality of resistors ( 1, 2 ) formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit are connected to power source pads ( 3, 4, 5, 6 ), which are terminal pads formed on the integrated circuit chip....
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
27.12.2001
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| Online Access | Get full text |
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| Summary: | A monitoring resistor element includes a plurality of resistors (
1, 2
) formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit are connected to power source pads (
3, 4, 5, 6
), which are terminal pads formed on the integrated circuit chip. A method for measuring a relative preciseness of resistors (
1, 2
) formed on an integrated circuit chip includes the step of performing the relative preciseness of the resistors by using power source pads (
3, 4, 5, 6
), to which the resistors (
1, 2
) are connected and which are terminal pads formed on the integrated circuit chip, as measuring pads when the measurement of relative preciseness of the resistors (
1, 2
) is performed. |
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