FAB YIELD ENHANCEMENT SYSTEM

A yield enhancement system organizes defect classification and attribute information into a global classification scheme. The global classes are used to identify defect sources and to generate inspection and review plans. The system accumulates defect information in a database and continually refine...

Full description

Saved in:
Bibliographic Details
Main Authors LAMEY, PATRICK H, MAIMON, AMOTZ, YARON, GAD
Format Patent
LanguageEnglish
Published 13.12.2001
Online AccessGet full text

Cover

More Information
Summary:A yield enhancement system organizes defect classification and attribute information into a global classification scheme. The global classes are used to identify defect sources and to generate inspection and review plans. The system accumulates defect information in a database and continually refines the information to improve the accuracy of the classification assignments and the identification of the defect sources.