Micromachined two dimensional array of piezoelectrically actuated flextensional transducers

A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped me...

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Bibliographic Details
Main Authors Percin, Gokhan, Khuri-Yakub, Butrus
Format Patent
LanguageEnglish
Published 01.11.2001
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Summary:A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped membrane.