High throughput wafer transfer mechanism
Disclosed is an apparatus and method for transporting objects between process chambers, and for transferring objects to and from process chambers with minimal handoff operations. The invention discloses a trolley type system (rail and car) for moving an external magnet adjacent a transfer chamber so...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
16.08.2001
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| Online Access | Get full text |
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| Summary: | Disclosed is an apparatus and method for transporting objects between process chambers, and for transferring objects to and from process chambers with minimal handoff operations. The invention discloses a trolley type system (rail and car) for moving an external magnet adjacent a transfer chamber so as to cause corresponding movement of an object transport device contained within the transfer chamber, via magnetic coupling. In one aspect, the object transport device is a blade type device that may transfer the object directly into a process chamber, and in a second aspect the object transport device is a telescoping type device that may extend between transport planes and chamber load/unload planes. A further aspect of the invention includes the networking of numerous transport and processing systems. A network node is provided that has rotatably mounted rails for altering the direction of the trolley car's movement. |
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