Synthesis and material characterization of amorphous and crystalline (α-) Al2O3via aerosol assisted chemical vapour depositionElectronic supplementary information (ESI) available. See DOI: 10.1039/c6ra24018f

The facile synthesis of Al 2 O 3 in the amorphous and corundum phase on both glass and quartz substrates is reported. The synthesis was carried out via aerosol assisted chemical vapour deposition using Al(acac) 3 and methanol. The films were analyzed using XRD, SEM, UV-vis spectroscopy and XPS. The...

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Bibliographic Details
Main Authors Ponja, Sapna D, Parkin, Ivan P, Carmalt, Claire J
Format Journal Article
LanguageEnglish
Published 31.10.2016
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Summary:The facile synthesis of Al 2 O 3 in the amorphous and corundum phase on both glass and quartz substrates is reported. The synthesis was carried out via aerosol assisted chemical vapour deposition using Al(acac) 3 and methanol. The films were analyzed using XRD, SEM, UV-vis spectroscopy and XPS. The coatings were highly crystalline (when annealed) with low carbon contamination levels and a relatively featureless morphology that gave rise to ultra high transparency in the UV, visible and near IR portions of the electromagnetic spectrum. The facile synthesis of Al 2 O 3 in the amorphous and corundum phase on glass and quartz substrates, respectively, is reported.
Bibliography:10.1039/c6ra24018f
Electronic supplementary information (ESI) available. See DOI
ISSN:2046-2069
DOI:10.1039/c6ra24018f