A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100 th -order stable harmonics

For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanica...

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Bibliographic Details
Published inScientific reports Vol. 7; no. 1; p. 4383
Main Authors Huang, Yongjun, Flores, Jaime Gonzalo Flor, Cai, Ziqiang, Yu, Mingbin, Kwong, Dim-Lee, Wen, Guangjun, Churchill, Layne, Wong, Chee Wei
Format Journal Article
LanguageEnglish
Published England 29.06.2017
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Summary:For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100 -order harmonics are obtained, with which the free-running frequency instability is lower than 10 at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors.
ISSN:2045-2322