Pt-Ru alloy electrode for(Ba,Sr)TiO sub(3) capacitor

• Published in: Journal of materials science. Materials in electronics Vol. 13; no. 6; pp. 327 - 330
• Main Authors: Yun, Jong-Ho, Oh, Ki-Young
• Format: Journal Article
• Language: English
• Published: 01.06.2002
• Subjects: Barium strontium titanates; Capacitors; Deposition; Electrodes; Oxidation; Platinum; Platinum base alloys; Ruthenium oxide

The Pt-Ru alloy was evaluated as a bottom electrode material in the (Ba,Sr)TiO sub(3) (BST) capacitor. Surface oxidation producing the RuO sub(2) layer for Pt-Ru(50 at %) first occurred and then BST film was deposited in the BST sputtering process. The thickness of RuO sub(2) formed from oxidation b...