Pt-Ru alloy electrode for(Ba,Sr)TiO sub(3) capacitor

The Pt-Ru alloy was evaluated as a bottom electrode material in the (Ba,Sr)TiO sub(3) (BST) capacitor. Surface oxidation producing the RuO sub(2) layer for Pt-Ru(50 at %) first occurred and then BST film was deposited in the BST sputtering process. The thickness of RuO sub(2) formed from oxidation b...

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Bibliographic Details
Published inJournal of materials science. Materials in electronics Vol. 13; no. 6; pp. 327 - 330
Main Authors Yun, Jong-Ho, Oh, Ki-Young
Format Journal Article
LanguageEnglish
Published 01.06.2002
Subjects
Barium strontium titanates
Capacitors
Deposition
Electrodes
Oxidation
Platinum
Platinum base alloys
Ruthenium oxide
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Summary:The Pt-Ru alloy was evaluated as a bottom electrode material in the (Ba,Sr)TiO sub(3) (BST) capacitor. Surface oxidation producing the RuO sub(2) layer for Pt-Ru(50 at %) first occurred and then BST film was deposited in the BST sputtering process. The thickness of RuO sub(2) formed from oxidation by an oxidant gas for BST formation, was thicker for the higher substrate temperature and the RuO sub(2) film shows the (1 0 1) orientation. The RuO sub(2) film between BST and Pt-Ru(50 at %) may block the diffusion of oxygen through the bottom electrode. The BST film deposited on Pt-Ru(50 at %) has a rough surface and a stronger intensity of (1 1 0) than that on Pt.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
content type line 23
ObjectType-Feature-1
ISSN:0957-4522
1573-482X
DOI:10.1023/A:1015688129902