Overcoat for hard disk medium)preparation and evaluation
Following a description of the layered structure of hard disk media, article details with the development, fabrication, and evaluation of carbon overcoats. Previous overcoats for hard disk are mainly sputter deposited carbon films, but they need further thinning. The overcoat thickness must decrease...
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Published in | Hyōmen gijutsu Vol. 53; no. 12; pp. 878 - 880 |
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Main Authors | , |
Format | Journal Article |
Language | Japanese |
Published |
01.12.2002
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Online Access | Get full text |
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Summary: | Following a description of the layered structure of hard disk media, article details with the development, fabrication, and evaluation of carbon overcoats. Previous overcoats for hard disk are mainly sputter deposited carbon films, but they need further thinning. The overcoat thickness must decrease to 10 nm for hard disk with areal recording density of above 5 Gb/in2 and to less than 5 nm for 10 Gb/in2. A suitable overcoat for such application is diamond-like carbon (DLC) made by using chemical vapor deposition (CVD). In plasma CVD of hydrogenated carbon films, various ways with plasma generation and ion leading-out have been proposed; regarding fabrication of magnetic disks, the most proper way to form DLC is a hot filament process. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-1 |
ISSN: | 0915-1869 |