A miniature piezoelectric ultrasonic motor based on circular bending vibration mode

• Published in: IEEE/ASME transactions on mechatronics Vol. 5; no. 4; pp. 326 - 330
• Main Authors: Dong, Shuxiang, Wang, Shuxin, Shen, Wenjiang, Li, Longtu
• Format: Journal Article
• Language: English
• Published: 01.12.2000
• ISSN: 1083-4435

A rod-type miniature piezoelectric ultrasonic motor based on free-free bending vibration mode with improved construction was developed for application of precise positioners. The design methodology, construction, and operation principle of the motor are presented. The FEM was used to model the motor's vibration modes and driving mechanism. The characteristics of the prototype were investigated experimentally. The experimental results reveal that both a corrugated tube-type horn and "soft-type" piezoelectric ceramic in the piezoelectric transducer (stator) can significantly widen the band of operational frequency of the motors. The developed prototypes, 15 mm in diameter and 25 mm in length, have shown some advantages, such as low speed (70 r/min) with large torque (0.055 N(dot)M), very high resolution (0.01), and good speed stability of over 10 h. The miniature motor has been successfully applied to a laser resonant cavity as a precise driving element. (Author)