Characterization of modifications observed on nitrides after an UV laser exposure

• Published in: Applied surface science Vol. 138-139; pp. 538 - 542
• Main Authors: Nicolas, G, Vacquier, G, Autric, M, Yaghdjian, L
• Format: Journal Article
• Language: English
• Published: 01.06.1998
• ISSN: 0169-4332

High-energy UV laser pulses are very useful to transform in the near surface region, very hard materials such as nitrides with great precision. By a suitable laser surface treatment, it is possible to modify the atom arrangements of the irradiated area and thus to change an insulator in a surface conducting material. Surface modifications on aluminium nitride (AlN) induced by an UV laser treatment have been investigated using advanced surface techniques (scanning electronic microscopy (SEM), energy dispersive spectroscopy (EDS). Auger electron spectroscopy (AES), X-ray diffraction (XRD), and electrical resistance measurements. AES and XRD analysis have revealed the presence of an Al metallic film upon the laser irradiated zone while SEM and EDS analysis have shown the formation of a halo rich in oxygen around it. Electrical measurements have confirmed the metallic nature of THE laser-exposed surface, where a conductive path can be drawn upon the insulator AlN ceramic. Irradiation parameters (energy density and number of pulses) have been determined regarding to the obtaining of a metallic thin film by this one-step process.