Change in surface morphologies with pulsed-laser-deposition-temperature for SrTiO sub(3) and Ba sub(0.7)Sr sub(0.3)TiO sub(3) thin films on Pt electrodes

• Published in: Thin solid films Vol. 323; no. 1-2; pp. 63 - 67
• Main Authors: Sugii, Nobuyuki, Takagi, Kazumasa
• Format: Journal Article
• Language: English
• Published: 22.06.1998
• ISSN: 0040-6090

Change in surface morphologies due to the growth temperature at which SrTiO sub(3) and Ba sub(0.7)Sr sub(0.3)TiO sub(3) thin films are formed on Pt electrodes by pulsed-laser deposition was investigated. The SrTiO sub(3) and Ba sub(0.7)Sr sub(0.3)TiO sub(3) films crystallized at temperatures as high as 350 and 450 degree C, respectively, and their dielectric constants reached values higher than 200 and 300, respectively, above these temperatures. Two types of surface roughening were observed: one was extreme surface roughening indicating insufficient grain growth near the crystallizing temperatures, and the other was surface roughening due to the grain growth of the Pt bottom electrode above 400 degree C which led to an increase in the leakage-current.