The performance of the IMR three-dimensional atom probe

This paper reports the design and the performance of a three-dimensional atom probe which was recently constructed at the Institute for Materials Research, Tohoku University, Japan. The new atom probe consists of both a reflectron type time-of-flight atom probe (ToFAP) and a position sensitive atom...

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Bibliographic Details
Published inApplied surface science Vol. 87-88; pp. 453 - 459
Main Authors Hono, K, Okano, R, Saeda, T, Sakurai, T
Format Journal Article
LanguageEnglish
Published 11.07.1994
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Summary:This paper reports the design and the performance of a three-dimensional atom probe which was recently constructed at the Institute for Materials Research, Tohoku University, Japan. The new atom probe consists of both a reflectron type time-of-flight atom probe (ToFAP) and a position sensitive atom probe (PoSAP). These are controlled with a CAMAC based controlling system interfaced with a Macintosh computer. The performance of the reflectron type atom probe and the position sensitive atom probe is demonstrated using a Cr-25Fe specimen.
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ISSN:0169-4332