WO sub(3) thin film sensor prepared by sol-gel technique and its low-temperature sensing properties to trimethylamine
Tungsten oxide (WO sub(3)) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl sub(6) as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures hi...
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Published in | Materials chemistry and physics Vol. 69; no. 1-3; pp. 176 - 179 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.03.2001
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Online Access | Get full text |
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Summary: | Tungsten oxide (WO sub(3)) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl sub(6) as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 500 degree C. The sensing characteristics of the thin film sensor to trimethylamine were measured. A low-temperature, high sensitivity, excellent selectivity, quick response and recover of thin film sensors to trimethylamine were found. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-1 |
ISSN: | 0254-0584 |