WO sub(3) thin film sensor prepared by sol-gel technique and its low-temperature sensing properties to trimethylamine

Tungsten oxide (WO sub(3)) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl sub(6) as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures hi...

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Bibliographic Details
Published inMaterials chemistry and physics Vol. 69; no. 1-3; pp. 176 - 179
Main Authors Tong, Maosong, Dai, Guorui, Gao, Dingsan
Format Journal Article
LanguageEnglish
Published 01.03.2001
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Summary:Tungsten oxide (WO sub(3)) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl sub(6) as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 500 degree C. The sensing characteristics of the thin film sensor to trimethylamine were measured. A low-temperature, high sensitivity, excellent selectivity, quick response and recover of thin film sensors to trimethylamine were found.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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ObjectType-Feature-1
ISSN:0254-0584