EFFECT OF OXYGEN PARTIAL PRESSURE ON TEXTURE DEVELOPMENT IN LEAD ZIRCONATE TITANATE THIN FILMS PROCESSED FROM METALLORGANIC PRECURSORS

Metallorganic liquid precursors were used to examine the effects of processing atmosphere on texture development in oriented Pb(Zr0.60Ti0.40)O3 thin films. After removal of organic ligands via pyrolysis, the films were heated at 25 C/min in a 5% H2/Ar atmosphere until a switching temperature, after...

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Bibliographic Details
Published inJournal of materials research Vol. 14; no. 12; pp. 4615 - 4620
Main Authors Norton, J L, Liedl, G L, Slamovich, E B
Format Journal Article
LanguageEnglish
Published 01.01.1999
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Summary:Metallorganic liquid precursors were used to examine the effects of processing atmosphere on texture development in oriented Pb(Zr0.60Ti0.40)O3 thin films. After removal of organic ligands via pyrolysis, the films were heated at 25 C/min in a 5% H2/Ar atmosphere until a switching temperature, after which the atmosphere was switched to pure oxygen. The films were heated to a maximum temperature of 650 C with switching temperatures ranging from 450 to 600 C. The degree of (111) orientation in the PZT films increased with increasing switching temperature, resulting in highly textured (111) PZT films. These results suggest that atmosphere control plays a significant role in texture development during rapid thermal processing. 18 refs.
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ISSN:0884-2914