CHARACTERISATION OF SOL-GEL Pb(Zr0.53TiO0.47)O3 FILMS IN THE THICKNESS RANGE 0.25-10 MICRON

Films of Pb(Zr0.53TiO0.47)O3, of thickness 0.25-10 micron, were prepared on Pt/Ti/SiO2/Si substrates by spin coating, and pre-fired at 350 and 600 C between the successive depositions before firing the multilayer stack at 700 C for 15 min. Variations in crystallite orientation, microstructure, diele...

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Bibliographic Details
Published inJournal of materials research Vol. 14; no. 5; pp. 1852 - 1859
Main Authors Kurchania, R, Milne, S J
Format Journal Article
LanguageEnglish
Published 01.01.1999
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Summary:Films of Pb(Zr0.53TiO0.47)O3, of thickness 0.25-10 micron, were prepared on Pt/Ti/SiO2/Si substrates by spin coating, and pre-fired at 350 and 600 C between the successive depositions before firing the multilayer stack at 700 C for 15 min. Variations in crystallite orientation, microstructure, dielectric and ferroelectric properties were studied as functions of film thickness. At a constant applied field, the remanent polarisation decreased as the film thickness decreased; the values of coercive field were constant for thicknesses down to 2 micron, but increased sharply as the film thickness decreased below 2 micron. Relative permittivity decreased with decreasing film thickness, with most of the reduction occurring in films less than 2 micron in thickness. The results are discussed in terms of the influence of interfacial phenomena. 28 refs.
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ISSN:0884-2914