Physical vapor deposition techniques for the growth of YBa sub(2)Cu sub(3)O sub(7) thin films

The growth and characterisation of YBa sub(2)Cu sub(3)O sub(7) thin films are reviewed. The discussion of growth is limited to the physical vapor deposition techniques of laser ablation, sputtering and evaporation. Emphasis is placed on the practical problems of growth epitaxial films in situ and ch...

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Published inSuperconductor science & technology Vol. 3; no. 1; pp. 38 - 52
Main Authors Humphreys, R G, Satchell, J S, Chew, N G, Edwards, J A, Goodyear, S W, Blenkinsop, S E, Dosser, O D, Cullis, A G
Format Journal Article
LanguageEnglish
Published 01.01.1990
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Summary:The growth and characterisation of YBa sub(2)Cu sub(3)O sub(7) thin films are reviewed. The discussion of growth is limited to the physical vapor deposition techniques of laser ablation, sputtering and evaporation. Emphasis is placed on the practical problems of growth epitaxial films in situ and characterising them.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
content type line 23
ObjectType-Feature-1
ISSN:0953-2048