Effect of hydrogen on hot electron energy relaxation in SiO sub 2 and Si sub 3 N sub 4 films

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Bibliographic Details
Published inThin solid films Vol. 221; no. 1-2; pp. 160 - 165
Main Authors Esaev, D G, Efimov, V M, Shklyaev, A A
Format Journal Article
LanguageEnglish
Published 01.01.1992
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ISSN:0040-6090