Optical Waveguides in Polymeric Material by Ion Implantation

• Published in: Surface & coatings technology Vol. 51; no. 1-3; pp. 318 - 323
• Main Authors: Ruck, D M, Brunner, S, Frank, W, Kulisch, J, Franke, H
• Format: Journal Article
• Language: English
• Published: 14.07.1991
• ISSN: 0257-8972

Poly(methyl-methacrylate)(PMMA) substrates were implanted with He exp + ions of energies between 50-250 keV and at 1 and 2 MeV. The ion dose was varied between 10 exp 12 -10 exp 15 ions/cm exp --2 . The increase in refractive index of the implanted surface layer was measured, which acts as an optical waveguide, by measuring the effective index of refraction n sub eff for different optical modes. According to the range of ions in the polymer, surface waveguides and buried waveguides could be generated. The number of modes which a waveguide can carry depends on the ion dose. To obtain single-mode waveguides, low ion doses were used. Waveguides with optical losses < 1 dB/cm exp --1 were found. The chemical effect induced by ion implantation was measured by IR spectroscopy and residual gas analysis, physical modification of the surface was studied by scanning electron microscopy. The refractive index profiles are discussed using simulation calculations.