Liquid metal ion sources

Liquid metal ion sources are widely used in focused ion beam processing for applications to surface research and microfabrication technology. The paper presents a brief review of the basic phenomena, their mechanisms, parameters and properties of liquid metal ion sources. The material and design pro...

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Bibliographic Details
Published inVacuum Vol. 44; no. 11-12; pp. 1095 - 1099
Main Authors Czarczynski, W, Znamirowski, Z
Format Journal Article
LanguageEnglish
Published 23.09.1991
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Summary:Liquid metal ion sources are widely used in focused ion beam processing for applications to surface research and microfabrication technology. The paper presents a brief review of the basic phenomena, their mechanisms, parameters and properties of liquid metal ion sources. The material and design problems are also discussed.
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ISSN:0042-207X