Fabrication of Nb/Al-Al sub(2)O sub(3)/Nb junctions with extremely low leakage currents

Nb/Al-Al sub(2)O sub(3)/Nb trilayer films are deposited using DC magnetron sputtering guns in a UHV system which is capable of 5 x 10 super(-10) Torr. SIS junctions as small as 3.2 x 3.2 mu m super(2) are isolated from the trilayer by standard photolithography. The sub-gap leakage current is compare...

Full description

Saved in:
Bibliographic Details
Published inIEEE transactions on magnetics Vol. 25; no. 2; pp. 1247 - 1250
Main Authors Lichtenberger, A W, McClay, C P, Mattauch, R J, Feldman, J J, Pan, S-K, Kerr, A R
Format Journal Article
LanguageEnglish
Published 01.01.1989
Online AccessGet full text

Cover

Loading…
Abstract Nb/Al-Al sub(2)O sub(3)/Nb trilayer films are deposited using DC magnetron sputtering guns in a UHV system which is capable of 5 x 10 super(-10) Torr. SIS junctions as small as 3.2 x 3.2 mu m super(2) are isolated from the trilayer by standard photolithography. The sub-gap leakage current is compared to the predictions of the BCS theory. The specific capacitance is preliminarily measured to be 45 plus or minus 5 fF/ mu m super(2).
AbstractList Nb/Al-Al sub(2)O sub(3)/Nb trilayer films are deposited using DC magnetron sputtering guns in a UHV system which is capable of 5 x 10 super(-10) Torr. SIS junctions as small as 3.2 x 3.2 mu m super(2) are isolated from the trilayer by standard photolithography. The sub-gap leakage current is compared to the predictions of the BCS theory. The specific capacitance is preliminarily measured to be 45 plus or minus 5 fF/ mu m super(2).
Author McClay, C P
Kerr, A R
Lichtenberger, A W
Pan, S-K
Mattauch, R J
Feldman, J J
Author_xml – sequence: 1
  givenname: A
  surname: Lichtenberger
  middlename: W
  fullname: Lichtenberger, A W
– sequence: 2
  givenname: C
  surname: McClay
  middlename: P
  fullname: McClay, C P
– sequence: 3
  givenname: R
  surname: Mattauch
  middlename: J
  fullname: Mattauch, R J
– sequence: 4
  givenname: J
  surname: Feldman
  middlename: J
  fullname: Feldman, J J
– sequence: 5
  givenname: S-K
  surname: Pan
  fullname: Pan, S-K
– sequence: 6
  givenname: A
  surname: Kerr
  middlename: R
  fullname: Kerr, A R
BookMark eNqNyrsKwjAUgOEMCl7f4Uxih2IvqbSjiOKki-BYknKq1ZhoTkL17b3gAzh9_PAPWEcbjR3Wj6I4Dws-5z02IDq_k2dx1GeHtZC2qYRrjAZTw1bOFipcKCAvp0mw-5oGs62Es9fVZyNoG3cCfDiLV1RPUKYFheIijgiVtxa1oxHr1kIRjn8O2WS92i834c2au0dy5bWhCpUSGo2nMsnigmc5T_8eX-sTREs
ContentType Journal Article
DBID 7U5
8FD
L7M
DatabaseName Solid State and Superconductivity Abstracts
Technology Research Database
Advanced Technologies Database with Aerospace
DatabaseTitle Technology Research Database
Solid State and Superconductivity Abstracts
Advanced Technologies Database with Aerospace
DatabaseTitleList Technology Research Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
Physics
EndPage 1250
GroupedDBID -~X
0R~
29I
4.4
5GY
6IK
7U5
8FD
AAJGR
ABQJQ
ACGFO
ACGFS
ACIWK
ACNCT
AENEX
AI.
ALLEH
ALMA_UNASSIGNED_HOLDINGS
ASUFR
BEFXN
BFFAM
BGNUA
BKEBE
BPEOZ
CS3
DU5
EBS
EJD
F5P
HZ~
H~9
ICLAB
IFIPE
IPLJI
JAVBF
L7M
LAI
M43
MS~
O9-
OCL
P2P
RIE
RIG
RNS
TN5
TWZ
VH1
VJK
ID FETCH-proquest_miscellaneous_251945843
ISSN 0018-9464
IngestDate Fri Aug 16 09:38:58 EDT 2024
IsPeerReviewed false
IsScholarly true
Issue 2
Language English
LinkModel OpenURL
MergedId FETCHMERGED-proquest_miscellaneous_251945843
Notes SourceType-Scholarly Journals-2
ObjectType-Conference Paper-1
content type line 23
SourceType-Conference Papers & Proceedings-1
ObjectType-Feature-2
ObjectType-Article-3
PQID 25194584
PQPubID 23500
ParticipantIDs proquest_miscellaneous_25194584
PublicationCentury 1900
PublicationDate 19890101
PublicationDateYYYYMMDD 1989-01-01
PublicationDate_xml – month: 01
  year: 1989
  text: 19890101
  day: 01
PublicationDecade 1980
PublicationTitle IEEE transactions on magnetics
PublicationYear 1989
SSID ssj0014510
Score 2.739287
Snippet Nb/Al-Al sub(2)O sub(3)/Nb trilayer films are deposited using DC magnetron sputtering guns in a UHV system which is capable of 5 x 10 super(-10) Torr. SIS...
SourceID proquest
SourceType Aggregation Database
StartPage 1247
Title Fabrication of Nb/Al-Al sub(2)O sub(3)/Nb junctions with extremely low leakage currents
URI https://search.proquest.com/docview/25194584
Volume 25
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3dS8MwEA9uIOiD6FT8Ng8ijlK3fm57HGNjjNmBbLi3kqSdX7WFtUX0r_fSpF1BYepLGtLSlv6au8vd_XIIXbVM2-p4VlNtUqqrZocwlbAWVe0FLIdApXG6JM-2cOzhzBzNrXlew12ySxJ6yz5_5JX8B1UYA1w5S_YPyBY3hQHoA77QAsLQ_grjAaFL6XPLVv6U744QqN1AiVPot3VY509kn3tU4bRDlRdQZSL_LXPCgnTmPsLgQwmid15F4pWn8TCxb1NcNl75wpDXlMgLjGeRhjfyGHIiZGGbj5_ZUyLyxmSlbKXw49yxXkBEuu-KWMZLjpNUlKS6V0oe7sCT7tmRHPVIkX5VeCekxNVAoJpip_Jc4gqqs_yz9JL4BGOjVVLFYHw1V3oqj807E3cwG4_daX8-raCKoVmCtlcEj0xLE8wj-ehvajazHaa7aEca_bgrENxDG35YQ9ulrSBraDNLxWXxPnoooYqjBXZoI8MUA443en2SHY16w6G4QBJzJHGBJAYksUQS50geoOtBf9obqvlbujDFedyGhH6Uxi4nF_NwtnGIqmEU-kcIw8SzqN1mxAbzfeEZhOlEs6ilGZ7pN_3WMbpcc7OTtVecoq0VomeomixT_xwssIReZN_7C2KHOe0
link.rule.ids 315,783,787
linkProvider IEEE
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Fabrication+of+Nb%2FAl-Al+sub%282%29O+sub%283%29%2FNb+junctions+with+extremely+low+leakage+currents&rft.jtitle=IEEE+transactions+on+magnetics&rft.au=Lichtenberger%2C+A+W&rft.au=McClay%2C+C+P&rft.au=Mattauch%2C+R+J&rft.au=Feldman%2C+J+J&rft.date=1989-01-01&rft.issn=0018-9464&rft.volume=25&rft.issue=2&rft.spage=1247&rft.epage=1250&rft.externalDBID=NO_FULL_TEXT
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0018-9464&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0018-9464&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0018-9464&client=summon