Investigation of Metal Evaporation by Mass Spectrometry
Electrical and mechanical properties of thin films are determined in addition to their material composition by the evaporation conditions. One of these conditions is the interaction between vapours and components of the residual gas. The aim was reproducible film structure. To obtain this it is nece...
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| Published in | Vacuum Vol. 33; no. 1-2; pp. 31 - 34 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
27.10.1981
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| Online Access | Get full text |
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| Summary: | Electrical and mechanical properties of thin films are determined in addition to their material composition by the evaporation conditions. One of these conditions is the interaction between vapours and components of the residual gas. The aim was reproducible film structure. To obtain this it is necessary to follow and to influence the changes of gas composition during evaporation and to recognize the components of the residual gas which are built into the film. The residual gas composition was investigated with low-resolution mass spectroscopy. The characteristic residual gas composition of the oil diffusion pumped system was determined, and changes of gas composition and partial pressure of certain gases were followed. Structure and electrical properties of Al films resulting from the controlled evaporation parameters were investigated.--BA |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-1 |
| ISSN: | 0042-207X |