Near surface stress determination in Kr-implanted polycrystalline titanium by the X-ray sin super(2) h-bar -method
Ion implantation has been performed on polycrystalline titanium samples with 180 keV Kr super(+) ions at various doses from 1x10 super(1) super(5) to 5x10 super(1) super(6) ions cm super(-) super(2) at room temperature. The samples where characterised by Rutherford backscattering spectrometry, posit...
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Published in | Surface & coatings technology Vol. 201; no. 19-20; pp. 8237 - 8241 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
05.08.2007
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Online Access | Get full text |
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Summary: | Ion implantation has been performed on polycrystalline titanium samples with 180 keV Kr super(+) ions at various doses from 1x10 super(1) super(5) to 5x10 super(1) super(6) ions cm super(-) super(2) at room temperature. The samples where characterised by Rutherford backscattering spectrometry, positron annihilation lifetime spectroscopy and X-ray diffraction. By means of the sin super(2) h-bar technique the near surface stress has been determined for both unimplanted and implanted samples. The initial stress state has been shown to be strongly tensile in the first 75 nm below the surface, and weakly compressive deeper inside. The main effect of the implantation process was to relax the pre-existing tensile stress in the track region. An additional compressive stress was introduced deeper in the sample and could be attributed to the presence of larger defect clusters. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-2 |
ISSN: | 0257-8972 |
DOI: | 10.1016/j.surfcoat.2006.02.072 |