Tunable, low loss Ba sub(0.6)Sr sub(0.4)TiO sub(3)/Bi sub(1.5)Mg sub(1.0)Nb sub(1.5)O sub(7)/Ba sub(0 .6)Sr sub(0.4)TiO sub(3) multilayer thin films prepared by pulsed laser deposition

• Published in: Journal of materials science. Materials in electronics Vol. 27; no. 8; pp. 7947 - 7952
• Main Authors: Ma, Baogang, Yu, Shihui, Chen, Shengtian, Zhang, Jieling, Huang, Xiushi, Liu, Qing, Zhang, Weifeng
• Format: Journal Article
• Language: English
• Published: 01.08.2016
• Subjects: Dielectric constant; Dielectric loss; Microwaves; Multilayers; Pulsed laser deposition; Silicon substrates; Tangents; Thin films
• ISSN: 0957-4522; 1573-482X
• DOI: 10.1007/s10854-016-4787-8

Ba sub(0.6)Sr sub(0.4)TiO sub( 3)/Bi sub(1.5)Mg sub(1.0)Nb sub(1.5)O sub(7)/Ba sub(0.6)Sr sub(0.4)TiO sub(3) (BST/BMN/BST) multilayer thin films and Ba sub(0.6)Sr sub(0.4)TiO sub(3) (BST) thin films were fabricated on Pt/Ti/SiO sub(2)/Si (1 0 0) substrates by pulsed laser deposition. The multilayer thin films show a dielectric constant of 314 and dielectric loss tangent of 0.006 at frequency of 0.1 MHz. The BST/BMN/BST multilayer thin films had a ~26.7 % relative tunability of dielectric constant at a maximum applied dc bias field of 357 kV/cm, while the figure of merit is 45.5. No obvious hysteresis behavior was observed in the BST/BMN/BST multilayer thin films. The excellent dielectric constant and tunability, low dielectric loss tangent suggest that BST/BMN/BST multilayer thin films have giant potential application for tunable microwave device.