Measurements of SiO sub(2) glass surface parameters by methods of microscopy
In this research we compare chemical and plasma treatment methods for surface of SiO sub(2) glass. For chemical treatment of surface tequila and alcohol were used but for plasma treatment - Ar+As and Ar+Se plasmas. Surface topography was analyzed using atomic force microscope. Comparison of chemical...
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Published in | IOP conference series. Materials Science and Engineering Vol. 38; pp. 1 - 4 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.01.2012
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Subjects | |
Online Access | Get full text |
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Summary: | In this research we compare chemical and plasma treatment methods for surface of SiO sub(2) glass. For chemical treatment of surface tequila and alcohol were used but for plasma treatment - Ar+As and Ar+Se plasmas. Surface topography was analyzed using atomic force microscope. Comparison of chemical and plasma treatment methods shows that surface treated with plasma is smoother. Because of their various chemical compositions tequila and alcohol show different results. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-2 |
ISSN: | 1757-8981 1757-899X |
DOI: | 10.1088/1757-899X/38/1/012043 |