Fabrication and evaluation of LiNbO sub( 3) periodic waveguide with etched grooves
A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO sub( 3) ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mu m was obtained by the 355 mu m-long periodic waveguide. The induced optical g...
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| Published in | Electronics letters Vol. 43; no. 11; p. 1 |
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| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
01.05.2007
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO sub( 3) ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mu m was obtained by the 355 mu m-long periodic waveguide. The induced optical group delay was estimated at 4.6 ps per 1 mm waveguide length. |
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| AbstractList | A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO sub( 3) ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mu m was obtained by the 355 mu m-long periodic waveguide. The induced optical group delay was estimated at 4.6 ps per 1 mm waveguide length. |
| Author | Enokihara, A Iwamoto, T Murata, H Adachi, J Suzuki, A Okamura, Y |
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| Snippet | A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO sub( 3) ridge is demonstrated. The grooves were fabricated by... |
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| SubjectTerms | Drying Etching Grooves Group delay Inductively coupled plasma Plugs Ridges Waveguides |
| Title | Fabrication and evaluation of LiNbO sub( 3) periodic waveguide with etched grooves |
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