Fabrication and evaluation of LiNbO sub( 3) periodic waveguide with etched grooves

A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO sub( 3) ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mu m was obtained by the 355 mu m-long periodic waveguide. The induced optical g...

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Bibliographic Details
Published inElectronics letters Vol. 43; no. 11; p. 1
Main Authors Enokihara, A, Suzuki, A, Adachi, J, Iwamoto, T, Murata, H, Okamura, Y
Format Journal Article
LanguageEnglish
Published 01.05.2007
Subjects
Drying
Etching
Grooves
Group delay
Inductively coupled plasma
Plugs
Ridges
Waveguides
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Summary:A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO sub( 3) ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mu m was obtained by the 355 mu m-long periodic waveguide. The induced optical group delay was estimated at 4.6 ps per 1 mm waveguide length.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:0013-5194
1350-911X