A Distributed Phase Shifter Using Bi sub(1.5)Zn sub(1.0)Nb sub(1.5)O sub(7)/Ba sub(0.5)Sr sub(0.5)TiO sub(3) Thin Films

• Published in: Chinese physics letters Vol. 30; no. 7; pp. 078503 - 1-078503-3
• Main Authors: LI, Ru-Guan, JIANG, Shu-Wen, GAO, Li-Bin, LI, Yan-Rong
• Format: Journal Article
• Language: English
• Published: 01.07.2013
• Subjects: Capacitors; Circuits; Deposition; Dielectrics; Microwaves; Noise levels; Phase shifters; Thin films

We report the demonstration of a monolithic phase shifter employing Bi sub(1.5)Zn sub(1.0)Nb sub(1.5)O sub(7) (BZN)/Ba sub(0.5)Sr sub(0.5)TiO sub(3) (BST) thin films on sapphire substrates. The BST and BZN thin films are successively deposited by radio-frequency magnetron sputtering. A distributed p...