Fabrication of 3D hexagonal bottle-like Si-SnO sub(2) core-shell nanorod arrays as anode material in on chip micro-lithium-ion-batteries

• Published in: Journal of materials chemistry. A, Materials for energy and sustainability Vol. 1; no. 27; pp. 7896 - 7904
• Main Authors: Yue, Chuang, Yu, Yingjian, Yin, Jun, Wong, Tailun, Zang, Yashu, Li, Jing, Kang, Junyong
• Format: Journal Article
• Language: English
• Published: 01.06.2013
• Subjects: Anodes; Arrays; Chips; Devices; Lithium; Lithium-ion batteries; Nanostructure; Sustainability; Three dimensional
• ISSN: 2050-7488; 2050-7496
• DOI: 10.1039/c3ta10601b

Three-dimensional (3D) Si-SnO sub(2) composite core-shell nanorod arrays were fabricated as the anode material in lithium ion micro-batteries by nanosphere lithography (NSL) combined with inductive coupled plasma (ICP) dry etching technology. The hexagonal bottle-like Si NR arrays in wafer scale with homogeneous morphology and good mechanical structure provide enough space to accommodate the volume expansion during Li ion insertion/de-insertion processes, while the additionally deposited SnO sub(2) thin film was prepared to successfully improve the capacities and cycle performance by configuring the 3D Si-SnO sub(2) NR composite electrode arrays. This fabrication method has the advantages of simplicity, large scale production, easy size and shape manipulations, low cost and Si-process compatibility. This work will facilitate the configuration of solid state micro-batteries for power supply in micro-electronic devices, such as MEMS devices or smart IC chips.