Integration of coplanar (Ba,Sr)TiO3 microwave phase shifters onto Si wafers TiO2 buffer layers

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Bibliographic Details
Published inIEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 53; no. 3; p. 518
Main Authors Ki-Byoung Kim, Ki-Byoung Kim, Tae-Soon Yun, Tae-Soon Yun, Jong-Chul Lee, Jong-Chul Lee, Hyun-Suk Kim, Hyun-Suk Kim, Ho-Gi Kim, Ho-Gi Kim, Il-Doo Kim, Il-Doo Kim
Format Journal Article
LanguageEnglish
Published New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01.03.2006
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ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2006.1610559