Application of Micromachined [Formula Omitted] -Cut-Quartz Bulk Acoustic Wave Resonator for Infrared Sensing

• Published in: Journal of microelectromechanical systems Vol. 20; no. 1; p. 288
• Main Authors: Pisani, Marcelo B, Ren, Kailiang, Kao, Ping, Tadigadapa, Srinivas
• Format: Journal Article
• Language: English
• Published: New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01.02.2011
• Subjects: Sensors; Silicon wafers; Studies
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2010.2100030

This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on -cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from -cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 [Formula Omitted] was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 [Formula Omitted], a detectivity of , and a noise equivalent temperature difference of 4 mK in the 8- to 14- wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined -cut-quartz resonators and their IR sensing response. [2010-0217]