Magnetic metamaterials by ion-implantation

We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting \(^{56}\)Fe\(^{+}\) ions, w...

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Bibliographic Details
Published inarXiv.org
Main Authors Vantaraki, Christina, Ström, Petter, Tran, Tuan T, Grassi, Matías P, Fevola, Giovanni, Foerster, Michael, Sadowski, Jerzy T, Primetzhofer, Daniel, Kapaklis, Vassilios
Format Paper
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 16.09.2024
Subjects
Chemical synthesis
Electron beam lithography
Ion implantation
Metamaterials
Minimal surfaces
Spatial resolution
Spin ice
Surface roughness
Thin films
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Summary:We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting \(^{56}\)Fe\(^{+}\) ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the successful application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements.
ISSN:2331-8422