High-resolution 3D phase-contrast imaging beyond the depth of field limit via ptychographic multi-slice electron tomography

Resolving single atoms in large-scale volumes has been a goal for atomic resolution microscopy for a long time. Electron microscopy has come close to this goal using a combination of advanced electron optics and computational imaging algorithms. However, atomic-resolution 3D imaging in volumes large...

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Bibliographic Details
Published inarXiv.org
Main Authors Romanov, Andrey, Min Gee Cho, Mary Cooper Scott, Ophus, Colin, Pelz, Philipp
Format Paper
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 05.11.2023
Subjects
Algorithms
Cobalt oxides
Depth of field
Electron optics
Image resolution
Microscopy
Position measurement
Tomography
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Summary:Resolving single atoms in large-scale volumes has been a goal for atomic resolution microscopy for a long time. Electron microscopy has come close to this goal using a combination of advanced electron optics and computational imaging algorithms. However, atomic-resolution 3D imaging in volumes larger than the depth of field limit of the electron optics has so far been out of reach. Electron ptychography, a computational imaging method allowing to solve the multiple-scattering problem from position- and momentum-resolved measurements, provides the opportunity to surpass this limit. Here, we experimentally demonstrate atomic resolution three-dimensional phase-contrast imaging in a volume surpassing the depth of field limits using multi-slice ptychographic electron tomography. We reconstruct tilt-series 4D-STEM measurements of a Co3O4 nanocube, yielding 1.75 Å resolution in a reconstructed volume of (18.2nm)^3.
ISSN:2331-8422