The optimization of SF^sub 6^ decomposition process using an electron beam

This study was carried out to apply the decomposition process of SF6 using an electron beam to the actual field by optimizing the process. To do this, we selected Inconel 625, which has excellent corrosion resistance and durability, as an optimal reactor film to prevent damage from by-products (Hydr...

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Bibliographic Details
Published inRadiation physics and chemistry (Oxford, England : 1993) Vol. 151; p. 192
Main Authors Park, Jun-Hyeong, Shin, In Hwan, Seo, Seo Hee, Choi, Chang Yong, Son, Youn-Suk
Format Journal Article
LanguageEnglish
Published Oxford Elsevier BV 01.10.2018
Subjects
Corrosion resistance
Damage prevention
Decomposition
Electron beams
Flow velocity
Greenhouse gases
Hydrogen fluoride
Nickel base alloys
Optimization
Sulfide compounds
Superalloys
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Summary:This study was carried out to apply the decomposition process of SF6 using an electron beam to the actual field by optimizing the process. To do this, we selected Inconel 625, which has excellent corrosion resistance and durability, as an optimal reactor film to prevent damage from by-products (Hydrogen fluoride). Among additive gases, H2 gas was used to enhance the removal efficiency (RE) of SF6 because it has the greatest contribution to the RE. Additionally, the initial concentrations of SF6, the currents, and the flow rates, considered the main optimal factors, were 1%, 15 mA, and 10 L/min, respectively. Based on the above experimental results, the long-term operating test was performed for 3.5 h at 10 L/min and for 8 h at 5 L/min. The removal efficiency of SF6 was constantly maintained at approximately 80% at a flow rate 10 L/min. On the other hand, when the flow rate was adjusted to 5 L/min, the RE continuously remained at a level of about 90%.
ISSN:0969-806X
1879-0895