The VIRMOS mask manufacturing tools: (b) Mask manufacturing and handling

We describe the VIRMOS Mask Manufacturing Unit (MMU) configuration, composed of two units:the Mask Manufacturing Machine (with its Control Unit) and the Mask Handling Unit (inclusive of Control Unit, Storage Cabinets and robot for loading of the Instrument Cabinets). For both VIMOS and NIRMOS instru...

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Bibliographic Details
Published inarXiv.org
Main Authors Conti, G, Chiappetti, L, Mattaini, E, Maccagni, D, O Le Fevre, Saisse, M, Vettolani, G
Format Paper
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 23.07.1999
Subjects
Cabinets
Configurations
Control equipment
Cutting parameters
Handling
Laser beam cutting
Machine tools
Manufacturing
Software
Storage
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Summary:We describe the VIRMOS Mask Manufacturing Unit (MMU) configuration, composed of two units:the Mask Manufacturing Machine (with its Control Unit) and the Mask Handling Unit (inclusive of Control Unit, Storage Cabinets and robot for loading of the Instrument Cabinets). For both VIMOS and NIRMOS instruments, on the basis of orders received by the Mask Preparation Software (see paper (a) in same proceedings), the function of the MMU is to perform an off-line mask cutting and identification, followed by mask storing and subsequent filling of the Instrument Cabinets (IC). We describe the characteristics of the LPKF laser cutting machine and the work done to support the choice of this equipment. We also describe the remaining of the hardware configuration and the Mask Handling Software.
ISSN:2331-8422