Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensi...

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Bibliographic Details
Published inarXiv.org
Main Authors Seguineau, C, Ignat, M, Malhaire, C, Brida, S, Lafontan, X, J -M Desmarres, Josserond, C, Debove, L
Format Paper
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 07.05.2008
Subjects
Actuation
Deformation
Elasticity
Mechanical properties
Microelectromechanical systems
Micromachining
Piezoelectric actuators
Piezoelectricity
Reliability analysis
Substrates
Tensile tests
Thin films
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Summary:This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.
ISSN:2331-8422