The regularized blind tip reconstruction algorithm as a scanning probe microscopy tip metrology method

The problem of an accurate tip radius and shape characterization is very important for determination of surface mechanical and chemical properties on the basis of the scanning probe microscopy measurements. We think that the most favorable methods for this purpose are blind tip reconstruction method...

Full description

Saved in:
Bibliographic Details
Published inarXiv.org
Main Authors Jozwiak, G, Henrykowski, A, Masalska, A, Gotszalk, T, Ritz, I, Steigmann, H
Format Paper
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 07.05.2011
Subjects
Algorithms
Atomic force microscopy
Chemical properties
Computer simulation
Inverse problems
Microscopes
Organic chemistry
Reconstruction
Regularization
Scanning electron microscopy
Scanning probe microscopy
Online AccessGet full text

Cover

More Information
Summary:The problem of an accurate tip radius and shape characterization is very important for determination of surface mechanical and chemical properties on the basis of the scanning probe microscopy measurements. We think that the most favorable methods for this purpose are blind tip reconstruction methods, since they do not need any calibrated characterizers and might be performed on an ordinary SPM setup. As in many other inverse problems also in case of these methods the stability of the solution in presence of vibrational and electronic noise needs application of so called regularization techniques. In this paper the novel regularization technique (Regularized Blind Tip Reconstruction - RBTR) for blind tip reconstruction algorithm is presented. It improves the quality of the solution in presence of isotropic and anisotropic noise. The superiority of our approach is proved on the basis of computer simulations and analysis of images of the Budget Sensors TipCheck calibration standard. In case of characterization of real AFM probes as a reference method the high resolution scanning electron microscopy was chosen and we obtain good qualitative correspondence of both methods.
ISSN:2331-8422