High-Resolution Transmission Electron Microscopy of Silicide Formation and Morphology Development of Ni/Si and Ni/Si^sub 1-x^Ge^sub x

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Bibliographic Details
Published inJournal of electronic materials Vol. 32; no. 11; p. 1171
Main Authors Chen, X, Shi, Z, Banerjee, S K, Zhou, J P, Rabenberg, L K
Format Journal Article
LanguageEnglish
Published Warrendale Springer Nature B.V 01.11.2003
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ISSN:0361-5235
1543-186X