Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles

This paper presents the research the formation of zinc-containing nanoparticles (NPs) in Si (001) after double-step hot implantation of 64Zn+ and 16O+ ions. High-resolution Transmission Electron Microscopy (HRTEM) and X-ray Diffraction (XRD) methods were used to study a crystal structure of the samp...

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Published inJournal of Nano- and Electronic Physics Vol. 7; no. 4; p. 4028-1
Main Authors Eidelman, K B, Shcherbachev, K D, N Yu Tabachkova, Goryachev, A V, Migunov, D M, Dronova, D A
Format Journal Article
LanguageEnglish
Published Sumy Ukraine Sumy State University, Journal of Nano - and Electronic Physics 01.10.2015
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Summary:This paper presents the research the formation of zinc-containing nanoparticles (NPs) in Si (001) after double-step hot implantation of 64Zn+ and 16O+ ions. High-resolution Transmission Electron Microscopy (HRTEM) and X-ray Diffraction (XRD) methods were used to study a crystal structure of the samples. Depth profiles of implanted impurity atoms were measured by Secondary Ion Mass Spectrometry (SIMS). Zn NPs with a size of 3 up to 50 nm were found in the implanted samples. Zinc-containing NPs with the size of 5-10 nm were found in the surface layer of as-implanted Si substrates. The effect of the order of implantation on structural defects and the impurity atoms depth profiles is established.
ISSN:2077-6772
2306-4277