Microstructure Modification of Yttria-Stabilized Zirconia Layers Prepared by EB-PVD

Microstructures and texture of yttria-stabilized zirconia (YSZ) layers prepared by electron beam physical vapor deposition (EB-PVD) were investigated, addressing the effect of processing parameters. All the YSZ layers investigated in this study showed a columnar structure. However, significant diffe...

Full description

Saved in:
Bibliographic Details
Published inJournal of the Ceramic Society of Japan Vol. 111; no. 1300; p. 883
Main Authors YAMAGUCHI, Norio, WADA, Kunihiko, KIMURA, Kazushige, MATSUBARA, Hideaki
Format Journal Article
LanguageEnglish
Published Tokyo Japan Science and Technology Agency 01.01.2003
Online AccessGet full text

Cover

More Information
Summary:Microstructures and texture of yttria-stabilized zirconia (YSZ) layers prepared by electron beam physical vapor deposition (EB-PVD) were investigated, addressing the effect of processing parameters. All the YSZ layers investigated in this study showed a columnar structure. However, significant differences were found in their microstructures. Morphology, porosity, and texture of the layers changed drastically by substrate manipulation during deposition. Without rotation, the layer showed a dense columnar structure with less intercolumnar gaps and obscure feather-like structures, and no preferred growth orientation. Rotation was very effective in developing feather-like structures within each column and hence increasing porosity. In addition, substrate rotation caused strong (100) texture. These results are attributed to the flux shadowing effect induced by oblique vapor incidence caused by substrate manipulation. The influence of electron beam power and substrate temperature was also investigated.
ISSN:1882-0743
1348-6535