Thickness and Temperature Effects on Magnetic Properties and Roughness of [Formula Omitted]-Ordered FePt Films

[Formula Omitted]-ordered FePt films with strong perpendicular magnetic anisotropy have been successfully obtained using Ta and MgO seed layers deposited on thermally oxidized Si wafers. In this paper, we focused on examining the [Formula Omitted]-crystalline ordering, surface roughness, and magneti...

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Bibliographic Details
Published inIEEE transactions on magnetics Vol. 46; no. 6; p. 2282
Main Authors Kim, Chang Soo, Sapan, Jonathan J, Moyerman, Stephanie, Lee, Kangho, Fullerton, Eric E, Kryder, Mark H
Format Journal Article
LanguageEnglish
Published New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01.06.2010
Subjects
Magnetism
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Summary:[Formula Omitted]-ordered FePt films with strong perpendicular magnetic anisotropy have been successfully obtained using Ta and MgO seed layers deposited on thermally oxidized Si wafers. In this paper, we focused on examining the [Formula Omitted]-crystalline ordering, surface roughness, and magnetic properties of the bottom FePt electrode in a perpendicular magnetic tunnel junction device. The influence of varying FePt thickness (2-18 nm) and deposition temperature (380-550[Formula Omitted]) on the formation of [Formula Omitted]-ordered FePt films has been studied. In order to investigate the FePt grain growth effects on the magnetic properties and the surface roughness, the morphology of [Formula Omitted]-ordered FePt films was examined through transmission electron microscope plan-view images.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2010.2045485