Development of an innovative 5 μm¬○ focused X-ray beam energy-dispersive spectrometer and its applications

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Bibliographic Details
Published inJapanese journal of applied physics Vol. 27; no. 11; pp. L2203 - L2206
Main Authors YAMAMOTO, N, HOSAKAWA, Y
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 1988
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
X- and γ-ray instruments and techniques
Tungsten Silicides
VLSI circuit
Impurity
X ray fluorescence
Focusing
X ray spectrometry
X ray
Total reflection
Dispersive spectrometry
X ray diffraction
Residual stress
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ISSN:0021-4922
1347-4065