High throughput vaccum chemical epitaxy

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Bibliographic Details
Published inJournal of crystal growth Vol. 105; no. 1-4; pp. 35 - 45
Main Authors FRAAS, L. M, MALOCSAY, E, SUNDARAM, V, BAIRD, R. W, MAO, B. Y, LEE, G. Y
Format Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier 1990
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Vacuum deposition
Crystal growth
Thickness
Gallium Arsenides
Epitaxy
Experimental study
Vacuum deposition
Thin film
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ISSN:0022-0248
1873-5002