Thin film deposition technique utilizing the anodic vacuum arc
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Published in | Surface & coatings technology Vol. 54-55; no. 1-3; pp. 343 - 348 |
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Main Authors | , , |
Format | Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier
1992
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Subjects | |
Online Access | Get full text |
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ISSN: | 0257-8972 1879-3347 |
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