Ion-beam-assisted deposition of magentron-sputtered metal nitrides
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| Published in | Surface & coatings technology Vol. 74-75; no. 1-3; pp. 793 - 801 |
|---|---|
| Main Authors | , , |
| Format | Conference Proceeding |
| Language | English |
| Published |
Lausanne
Elsevier
1995
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| Subjects | |
| Online Access | Get full text |
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| Author | HERRMANN, U BÄTHER, K.-H SCHRÖER, A |
|---|---|
| Author_xml | – sequence: 1 givenname: K.-H surname: BÄTHER fullname: BÄTHER, K.-H organization: MAT Gmbh Dresden, Reisstrasses 3, 01257 Dresden, Germany – sequence: 2 givenname: U surname: HERRMANN fullname: HERRMANN, U organization: MAT Gmbh Dresden, Reisstrasses 3, 01257 Dresden, Germany – sequence: 3 givenname: A surname: SCHRÖER fullname: SCHRÖER, A organization: MAT Gmbh Dresden, Reisstrasses 3, 01257 Dresden, Germany |
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| Issue | 1-3 |
| Keywords | Refractory metals Ion beam Mechanical properties Friction factor Surface treatments Experimental study Coatings Sputtering Titanium nitrides Thin films Magnetrons Nitrides Friction Aluminium nitrides Physical vapor deposition Tribology |
| Language | English |
| License | CC BY 4.0 |
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| SubjectTerms | Cross-disciplinary physics: materials science; rheology Deposition by sputtering Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics |
| Title | Ion-beam-assisted deposition of magentron-sputtered metal nitrides |
| Volume | 74-75 |
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