Ion-beam-assisted deposition of magentron-sputtered metal nitrides

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Bibliographic Details
Published inSurface & coatings technology Vol. 74-75; no. 1-3; pp. 793 - 801
Main Authors BÄTHER, K.-H, HERRMANN, U, SCHRÖER, A
Format Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier 1995
Subjects
Cross-disciplinary physics: materials science; rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Refractory metals
Ion beam
Mechanical properties
Friction factor
Surface treatments
Experimental study
Coatings
Sputtering
Titanium nitrides
Thin films
Magnetrons
Nitrides
Friction
Aluminium nitrides
Physical vapor deposition
Tribology
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ISSN:0257-8972
1879-3347