Fine patterning of Al2O3 thin films by the photolysis of gel films chemically modified with benzoylacetone
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Published in | Nihon Seramikkusu Kyōkai gakujutsu ronbunshi Vol. 103; no. 12; pp. 1293 - 1296 |
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Main Authors | , |
Format | Journal Article |
Language | Japanese |
Published |
Tokyo
Nippon seramikkusu kyokai
1995
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Online Access | Get full text |
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ISSN: | 0914-5400 |
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