Design and fabrication of a multiple-thickness electrochemical cantilever sensor Micro/Nano Devices and Systems 2013: An open thematic journal issue
Saved in:
Published in | Microelectronic engineering Vol. 119; pp. 1 - 5 |
---|---|
Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier
2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0167-9317 1873-5568 |
---|