Effects of polydimethylsiloxane (PDMS) microchannels on surface acoustic wave-based microfluidic devices

• Published in: Microelectronic engineering Vol. 113; pp. 98 - 104
• Main Authors: MYEONG CHAN JO, GULDIKEN, Rasim
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier 2013
• Subjects: Acoustic wave devices, piezoelectric and piezoresistive devices; Applied fluid mechanics; Applied sciences; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Electronics; Exact sciences and technology; Fluid dynamics; Fluidics; Fundamental areas of phenomenology (including applications); Mechanical and acoustical properties; adhesion; Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Solid surfaces and solid-solid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Performance evaluation; Prototype; Rayleigh waves; Surface acoustic wave devices; Polydimethylsiloxane (PDMS); Acoustic surface waves; Microfluidic channels; Micromachine; Energy dissipation; Displacement rates; Optical characteristic; Diffusion; Polymers; Optical constants; Cost lowering; Dimethylsiloxane polymer; Radiation effects; Interdigital transducers; Elastomers; Interdigital transducer (IDT); Surface acoustic wave; Thickness; Insertion loss; Compatibility; Energy absorption; Microfluidics; Fluidics
• ISSN: 0167-9317; 1873-5568